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Shanghai, CN
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last 30 patents
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Patent Application
A STEPPER LITHOGRAPHY APPARATUS AND OPERATING METHOD THEREFOR, AND...
Publication number
20240103373
Publication date
Mar 28, 2024
Parcan Nanotech Co., Ltd.
Xiangqian ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SUB-NANOSCALE HIGH-PRECISION LITHOGRAPHY WRITING FIELD STITCHING ME...
Publication number
20230296990
Publication date
Sep 21, 2023
Parcan Nanotech Co., Ltd.
Xiangqian ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY