Xiangyang Wu

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Andover, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Implantation using solid aluminum iodide (ALI3) for producing atomi...
- Patent number 10,774,419
- Issue date Sep 15, 2020
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Beam angle adjustment in ion implanters
- Patent number 7,696,494
- Issue date Apr 13, 2010
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of tuning electrostatic quadrupole electrodes of an ion beam...
- Patent number 6,774,378
- Issue date Aug 10, 2004
- Axcelis Technologies, Inc.
- Yongzhang Huang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
HYDROGEN CO-GAS WHEN USING A CHLORINE-BASED ION SOURCE MATERIAL
- Publication number 20220013323
- Publication date Jan 13, 2022
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMI...
- Publication number 20170362700
- Publication date Dec 21, 2017
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS
- Publication number 20080067442
- Publication date Mar 20, 2008
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS