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Xianming Tang
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method for controlling radial distribution of plasma ion density an...
Patent number
8,920,611
Issue date
Dec 30, 2014
Applied Materials, Inc.
John C. Forster
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD FOR CONTROLLING RADIAL DISTRIBUTION OF PLASMA ION DENSITY AN...
Publication number
20100012480
Publication date
Jan 21, 2010
Applied Materials, Inc.
John C. Forster
H01 - BASIC ELECTRIC ELEMENTS