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Patents Grants
last 30 patents
Information
Patent Grant
Maskless photolithographic system in cooperative working mode for c...
Patent number
10,317,800
Issue date
Jun 11, 2019
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser micro/nano processing system and method
Patent number
9,636,777
Issue date
May 2, 2017
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser micro/nano processing system and method
Patent number
9,187,318
Issue date
Nov 17, 2015
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
MASKLESS PHOTOLITHOGRAPHIC SYSTEM IN COOPERATIVE WORKING MODE FOR C...
Publication number
20180217501
Publication date
Aug 2, 2018
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER MICRO/NANO PROCESSING SYSTEM AND METHOD
Publication number
20160096233
Publication date
Apr 7, 2016
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER MICRO/NANO PROCESSING SYSTEM AND METHOD
Publication number
20130183833
Publication date
Jul 18, 2013
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
Xuanming Duan
B81 - MICRO-STRUCTURAL TECHNOLOGY