Membership
Tour
Register
Log in
Xiao-Chun Mu
Follow
Person
State College, PA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Post dry-etch cleaning method for restoring wafer properties
Patent number
4,897,154
Issue date
Jan 30, 1990
International Business Machines Corporation
Satya N. Chakravarti
H01 - BASIC ELECTRIC ELEMENTS