Xiao Xu

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Needham, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for extending a lifetime of an ion source for mol...
- Patent number 11,756,772
- Issue date Sep 12, 2023
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching aluminum nitride or aluminum oxide to generate an aluminum...
- Patent number 11,699,563
- Issue date Jul 11, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING ALUMINUM NITRIDE OR ALUMINUM OXIDE TO GENERATE AN ALUMINUM...
- Publication number 20220139662
- Publication date May 5, 2022
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOL...
- Publication number 20200388468
- Publication date Dec 10, 2020
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS