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Xiaochun Linda Chen
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Hopewell Junction, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sub-resolution sized assist features
Patent number
7,141,338
Issue date
Nov 28, 2006
Infineon Technologies AG
Xiaochun Linda Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Elimination of resist footing on tera hardmask
Patent number
6,815,367
Issue date
Nov 9, 2004
Infineon Technologies AG
Xiaochun Linda Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography method for preventing lithographic exposure of peripher...
Patent number
6,713,236
Issue date
Mar 30, 2004
Infineon Technologies North America Corp.
Xiaochun Linda Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process for implementation of a hardmask
Patent number
6,541,387
Issue date
Apr 1, 2003
Infineon Technologies AG
Xiaochun Linda Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of suppressing the effect of shining spots present at the ed...
Publication number
20050014364
Publication date
Jan 20, 2005
Infineon Technologies North America Corp.
Xiaochun Linda Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern transfer in device fabrication
Publication number
20040121264
Publication date
Jun 24, 2004
Bernhard Liegl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sub-resolution sized assist features
Publication number
20040091790
Publication date
May 13, 2004
Infineon Technologies North America Corp.
Xiaochun Linda Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY METHOD FOR PREVENTING LITHOGRAPHIC EXPOSURE OF PERIPHER...
Publication number
20040005516
Publication date
Jan 8, 2004
Infineon Technologies North America Corp.
Xiaochun Linda Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Elimination of resist footing on tera hardmask
Publication number
20030190811
Publication date
Oct 9, 2003
Infineon Technologies North America Corp.
Xiaochun Linda Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY