Xiaodong YANG

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Xi'an, CN

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Patents Grantslast 30 patents

Information Patent Grant
Tilted magnetron in a PVD sputtering deposition chamber
- Patent number 11,784,032
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Lizhong Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for zone control of RF bias for stress unifor...
- Patent number 11,450,511
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Lizhong Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for depositing a metal containing layer on a s...
- Patent number 11,170,998
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Lizhong Sun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR REDUCING SURFACE DEFECTS IN ACTIVE FILM LAYERS
- Publication number 20230345836
- Publication date Oct 26, 2023
- Ming GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ZONE CONTROL OF RF BIAS FOR STRESS UNIFOR...
- Publication number 20220157563
- Publication date May 19, 2022
- Lizhong SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TILTED MAGNETRON IN A PVD SPUTTERING DEPOSITION CHAMBER
- Publication number 20210351024
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Lizhong SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING A METAL CONTAINING MATERIAL
- Publication number 20200335332
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Lizhong SUN
- H01 - BASIC ELECTRIC ELEMENTS