Xiaohua Shen

Follow

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Non-melt thin-wafer laser thermal annealing methods
- Patent number 9,490,128
- Issue date Nov 8, 2016
- Ultratech, Inc.
- Yun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-beam laser annealing with improved temperature performance
- Patent number 8,906,742
- Issue date Dec 9, 2014
- Ultratech, Inc.
- Xiaohua Shen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Two-beam laser annealing with improved temperature performance
- Patent number 8,546,805
- Issue date Oct 1, 2013
- Ultratech, Inc.
- Xiaohua Shen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Non-melt thin-wafer laser thermal annealing methods
- Publication number 20140057457
- Publication date Feb 27, 2014
- ULTRATECH, INC.
- Yun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two-beam laser annealing with improved temperature performance
- Publication number 20140004627
- Publication date Jan 2, 2014
- Ultratech
- Xiaohua Shen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TWO-BEAM LASER ANNEALING WITH IMPROVED TEMPERATURE PERFORMANCE
- Publication number 20130196455
- Publication date Aug 1, 2013
- ULTRATECH, INC.
- Xiaohua Shen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR