Xiaolan Chen

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Tigard, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
High power low pressure UV bulb with plasma resistant coating
- Patent number 10,354,857
- Issue date Jul 16, 2019
- Lam Research Corporation
- Xiaolan Chen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Clean resistant windows for ultraviolet thermal processing
- Patent number 10,240,236
- Issue date Mar 26, 2019
- Lam Research Corporation
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measuring in-situ UV intensity in UV cure tool
- Patent number 8,283,644
- Issue date Oct 9, 2012
- Novellus Systems, Inc.
- Eugene Smargiassi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
HIGH POWER LOW PRESSURE UV BULB WITH PLASMA RESISTANT COATING
- Publication number 20180182607
- Publication date Jun 28, 2018
- LAM RESEARCH CORPORATION
- Xiaolan Chen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING
- Publication number 20160258057
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TESTING METHOD FOR LED WAFER
- Publication number 20120326060
- Publication date Dec 27, 2012
- Boaz Kenane
- G01 - MEASURING TESTING
Information Patent Application
MEASURING IN-SITU UV INTENSITY IN UV CURE TOOL
- Publication number 20120161021
- Publication date Jun 28, 2012
- Eugene Smargiassi
- G01 - MEASURING TESTING