Xiaolan Chen

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Albuquerque, NM, US

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Patents Grantslast 30 patents

Information Patent Grant
Diamond supported photocathodes for electron sources
- Patent number 6,759,800
- Issue date Jul 6, 2004
- Applied Materials, Inc.
- Andres Fernandez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam lithography system with multiple beam modula...
- Patent number 6,724,002
- Issue date Apr 20, 2004
- Applied Materials, Inc.
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam column using high numerical aperture photocathode sou...
- Patent number 6,448,568
- Issue date Sep 10, 2002
- Applied Materials, Inc.
- Paul C. Allen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for improving pattern fidelity in diffraction-...
- Patent number 6,320,648
- Issue date Nov 20, 2001
- Steven R. J. Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for integrating optical and interferometric l...
- Patent number 6,233,044
- Issue date May 15, 2001
- Steven R. J. Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for lithography of sparse arrays of sub-micro...
- Patent number 5,759,744
- Issue date Jun 2, 1998
- University of New Mexico
- Steven R.J. Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Multiple electron beam lithography system with multiple beam modula...
- Publication number 20030042434
- Publication date Mar 6, 2003
- Marian Mankos
- B82 - NANO-TECHNOLOGY