Xiaolan ZHONG

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming intermetallic air gap
- Patent number 12,002,708
- Issue date Jun 4, 2024
- Shanghai IC R&D Center Co., Ltd.
- Xiaoxu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for improving film thickness uniformity
- Patent number 11,769,679
- Issue date Sep 26, 2023
- Shanghai IC R&D Center Co., Ltd.
- Xiaolan Zhong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING INTERMETALLIC AIR GAP
- Publication number 20220246466
- Publication date Aug 4, 2022
- XIAOXU KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR IMPROVING FILM THICKNESS UNIFORMITY
- Publication number 20210043483
- Publication date Feb 11, 2021
- Shanghai IC R&D Center Co., Ltd.
- Xiaolan ZHONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...