Xiaoli LU

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Chigasaki-shi, Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering target and method of producing sputtering target
- Patent number 11,421,315
- Issue date Aug 23, 2022
- Ulvac, Inc.
- Xiaoli Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING TARGET AND METHOD OF PRODUCING SPUTTERING TARGET
- Publication number 20210172056
- Publication date Jun 10, 2021
- Xiaoli LU
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...