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METHOD FOR ETCHING CURVED SUBSTRATE
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Publication number 20230174416
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Publication date Jun 8, 2023
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The Institute of Optics and Electronics, The Chinese Academy of Sciences
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Xiangang Luo
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MULTIFUNCTIONAL LITHOGRAPHY DEVICE
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Publication date Apr 27, 2023
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The Institute of Optics and Electronics, The Chinese Academy of Sciences
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Xiangang Luo
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METHOD OF FABRICATING MICRO-NANO STRUCTURE
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Publication number 20230132100
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Publication date Apr 27, 2023
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The Institute of Optics and Electronics, The Chinese Academy of Sciences
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Xiangang Luo
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHODS AND APPARATUSES FOR COATING PHOTORESIST
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Publication number 20200233306
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Publication date Jul 23, 2020
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The Institute of Optics and Electronics, The Chinese Academy of Sciences
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Xiangang Luo
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
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Publication number 20160259253
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Publication date Sep 8, 2016
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Institute of Optics and Electronics, Chinese Academy of Sciences
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Xiangang LUO
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY