Xiaolin Han

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Chengdu, CN

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Patents Grantslast 30 patents

Information Patent Grant
Wet metal-etching method and apparatus for MEMS device fabrication
- Patent number 8,425,718
- Issue date Apr 23, 2013
- University of Electronic Science and Technology of China
- Yadong Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Wet metal-etching method and apparatus used for MEMS
- Publication number 20110223771
- Publication date Sep 15, 2011
- University of Electronic Science and Technology of China
- Yadong Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY