Xiaoming Yin

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Hopewell Junction, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Enhanced overlay measurement marks for overlay alignment and exposu...
- Patent number 6,727,989
- Issue date Apr 27, 2004
- Infineon Technologies AG
- Xiaoming Yin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay alignment system using polarization schemes
- Patent number 6,525,818
- Issue date Feb 25, 2003
- Infineon Technologies AG
- Xiaoming Yin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY