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Shanghai, CN
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Patents Grants
last 30 patents
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Patent Grant
Dual stage positioning and switching system
Patent number
8,134,689
Issue date
Mar 13, 2012
Shanghai Micro Electronics Equipment Co., Ltd.
Xiaoping Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Precise positioning system for dual stage switching exposure
Patent number
8,027,028
Issue date
Sep 27, 2011
Shanghai Micro Electronics Equipment Co., Ltd.
Yingsheng Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DUAL STAGE POSITIONING AND SWITCHING SYSTEM
Publication number
20100045961
Publication date
Feb 25, 2010
Xiaoping Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY