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XIAOPING ZHOU
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High power showerhead with recursive gas flow distribution
Patent number
10,954,595
Issue date
Mar 23, 2021
Applied Materials, Inc.
Hamid Noorbakhsh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Extended detachable gas distribution plate and showerhead incorpora...
Patent number
10,886,107
Issue date
Jan 5, 2021
Applied Materials, Inc.
Hamid Noorbakhsh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support with symmetrical feed structure
Patent number
10,770,328
Issue date
Sep 8, 2020
Applied Materials, Inc.
Xing Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for controlling temperature uniformity of a substrate
Patent number
10,386,126
Issue date
Aug 20, 2019
Applied Materials, Inc.
Kallol Bera
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Showerhead having an extended detachable gas distribution plate
Patent number
10,373,810
Issue date
Aug 6, 2019
Applied Materials, Inc.
Hamid Noorbakhsh
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate support with symmetrical feed structure
Patent number
10,096,494
Issue date
Oct 9, 2018
Applied Materials, Inc.
Xing Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for etching high aspect ratio features
Patent number
9,991,109
Issue date
Jun 5, 2018
Applied Materials, Inc.
Xiaoping Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for controlling the temperature uniformity of a substrate
Patent number
9,267,742
Issue date
Feb 23, 2016
Applied Materials, Inc.
Kallol Bera
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Multi-zoned plasma processing electrostatic chuck with improved tem...
Patent number
9,248,509
Issue date
Feb 2, 2016
Applied Materials, Inc.
Hamid Tavassoli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
9,214,315
Issue date
Dec 15, 2015
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate support with symmetrical feed structure
Patent number
9,123,762
Issue date
Sep 1, 2015
Applied Materials, Inc.
Xing Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
8,916,793
Issue date
Dec 23, 2014
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zoned plasma processing electrostatic chuck with improved tem...
Patent number
8,822,876
Issue date
Sep 2, 2014
Applied Materials, Inc.
Hamid Tavassoli
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and apparatus for controlling substrate temperature in a pr...
Patent number
8,633,423
Issue date
Jan 21, 2014
Applied Materials, Inc.
Xing Lin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for etching high aspect ratio features
Patent number
8,475,625
Issue date
Jul 2, 2013
Applied Materials, Inc.
Sharma Pamarthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for etching high aspect ratio features
Patent number
8,440,049
Issue date
May 14, 2013
Applied Materials, Inc.
Xiaoping Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas flow diffuser
Patent number
8,123,902
Issue date
Feb 28, 2012
Applied Materials, Inc.
Paul Brillhart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
HIGH POWER SHOWERHEAD WITH RECURSIVE GAS FLOW DISTRIBUTION
Publication number
20210032752
Publication date
Feb 4, 2021
Applied Materials, Inc.
Hamid Noorbakhsh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EXTENDED DETACHABLE GAS DISTRIBUTION PLATE AND SHOWERHEAD INCORPORA...
Publication number
20190326100
Publication date
Oct 24, 2019
Applied Materials, Inc.
Hamid Noorbakhsh
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
Publication number
20190051551
Publication date
Feb 14, 2019
XING LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD HAVING AN EXTENDED DETACHABLE GAS DISTRIBUTION PLATE
Publication number
20170243724
Publication date
Aug 24, 2017
Applied Materials, Inc.
Hamid Noorbakhsh
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
APPARATUS FOR CONTROLLING TEMPERATURE UNIFORMITY OF A SUBSTRATE
Publication number
20160169593
Publication date
Jun 16, 2016
KALLOL BERA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
Publication number
20150371877
Publication date
Dec 24, 2015
Applied Materials, Inc.
XING LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20150316941
Publication date
Nov 5, 2015
Applied Materials, Inc.
Fernando M. SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEM...
Publication number
20140346743
Publication date
Nov 27, 2014
Hamid Tavassoli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES
Publication number
20140020834
Publication date
Jan 23, 2014
Applied Materials, Inc.
Xiaoping ZHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20120132397
Publication date
May 31, 2012
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE
Publication number
20120097332
Publication date
Apr 26, 2012
Applied Materials, Inc.
XING LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE TEMPERATURE IN A PR...
Publication number
20120091108
Publication date
Apr 19, 2012
Applied Materials, Inc.
XING LIN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEM...
Publication number
20120091104
Publication date
Apr 19, 2012
Applied Materials, Inc.
Hamid Tavassoli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR CONTROLLING TEMPERATURE UNIFORMITY OF A SUBSTRATE
Publication number
20110180243
Publication date
Jul 28, 2011
Applied Materials, Inc.
KALLOL BERA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
ETCH REACTOR SUITABLE FOR ETCHING HIGH ASPECT RATIO FEATURES
Publication number
20100099266
Publication date
Apr 22, 2010
Applied Materials, Inc.
Manfred Oswald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING TEMPERATURE OF A SUBSTRATE
Publication number
20090159566
Publication date
Jun 25, 2009
Applied Materials, Inc.
Paul L. Brillhart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS FLOW DIFFUSER
Publication number
20080230518
Publication date
Sep 25, 2008
APPLIED MATERIALS, INC.
Paul Brillhart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES
Publication number
20070256786
Publication date
Nov 8, 2007
Xiaoping Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES
Publication number
20070256785
Publication date
Nov 8, 2007
Sharma Pamarthy
H01 - BASIC ELECTRIC ELEMENTS