Xiaoqing Yang

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for detecting degree of particulate contamination on flat...
- Patent number 10,345,247
- Issue date Jul 9, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yongqiang Shen
- G01 - MEASURING TESTING
Information Patent Grant
Backside alignment apparatus and method
- Patent number 9,188,434
- Issue date Nov 17, 2015
- Shanghai Micro Electronics Equipment Co., Ltd.
- Bing Xu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR DETECTING DEGREE OF PARTICULATE CONTAMINATION ON FLAT...
- Publication number 20180246040
- Publication date Aug 30, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yongqiang SHEN
- G01 - MEASURING TESTING
Information Patent Application
BACKSIDE ALIGNMENT APPARATUS AND METHOD
- Publication number 20130271750
- Publication date Oct 17, 2013
- Bing Xu
- G01 - MEASURING TESTING