Xiaowei Shang

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
CMP method for copper, tungsten, titanium, polysilicon, and other s...
- Patent number 7,247,566
- Issue date Jul 24, 2007
- Dupont Air Products Nanomaterials LLC
- Melvin K. Carter
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Chemical-mechanical planarization using ozone
- Patent number 6,756,308
- Issue date Jun 29, 2004
- EKC Technology, Inc.
- Robert J. Small
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CMP method for copper, tungsten, titanium, polysilicon, and other s...
- Publication number 20050090109
- Publication date Apr 28, 2005
- Melvin K. Carter
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical-mechanical planarization using ozone
- Publication number 20040161938
- Publication date Aug 19, 2004
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Fenton's reagent composition for chemical-mechanical polishing, met...
- Publication number 20040025444
- Publication date Feb 12, 2004
- EKC Technology, Inc.
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical-mechanical planarization using ozone
- Publication number 20020111026
- Publication date Aug 15, 2002
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...