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Xiaoyi Chen
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Redwood City, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for improving CD micro-loading in photomask plasma etching
Patent number
10,199,224
Issue date
Feb 5, 2019
Applied Materials, Inc.
Zhigang Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for in-situ chamber clean in plasma etching processing chamber
Patent number
10,115,572
Issue date
Oct 30, 2018
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Method for improving CD micro-loading in photomask plasma etching
Patent number
9,425,062
Issue date
Aug 23, 2016
Applied Materials, Inc.
Zhigang Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for plasma etching a chromium layer suitable for photomask f...
Patent number
7,829,243
Issue date
Nov 9, 2010
Applied Materials, Inc.
Xiaoyi Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Phase shifting photomask and a method of fabricating thereof
Patent number
7,635,546
Issue date
Dec 22, 2009
Applied Materials, Inc.
Scott Alan Anderson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for removal of metallic residue after plasma etching of a me...
Patent number
7,320,942
Issue date
Jan 22, 2008
Applied Materials, Inc.
Xiaoyi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching a magnetic material
Patent number
7,105,361
Issue date
Sep 12, 2006
Applied Materials, Inc.
Xiaoyi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removal of residue from a magneto-resistive random acces...
Patent number
6,984,585
Issue date
Jan 10, 2006
Chentsau Ying
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing residue from a magneto-resistive random access...
Patent number
6,964,928
Issue date
Nov 15, 2005
Chentsau Ying
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching magnetic and ferroelectric materials using a puls...
Patent number
6,942,813
Issue date
Sep 13, 2005
Applied Materials, Inc.
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for removing conductive residue
Patent number
6,933,239
Issue date
Aug 23, 2005
Applied Materials, Inc.
Chentsau Ying
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching a magnetic material
Patent number
6,911,346
Issue date
Jun 28, 2005
Applied Materials, Inc.
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of fabricating a magneto-resistive random access memory (MRA...
Patent number
6,841,484
Issue date
Jan 11, 2005
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching methods for a magnetic memory cell stack
Patent number
6,821,907
Issue date
Nov 23, 2004
Jeng H. Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning a layer of magnetic material
Patent number
6,759,263
Issue date
Jul 6, 2004
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma heating of a substrate with subsequent high temperature etching
Patent number
6,709,609
Issue date
Mar 23, 2004
Applied Materials Inc.
Jeng H. Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of plasma heating and etching a substrate
Patent number
6,692,648
Issue date
Feb 17, 2004
Applied Materials Inc.
Jeng H. Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHODS FOR IN-SITU CHAMBER CLEAN IN PLASMA ETCHING PROCESSING CHAMBER
Publication number
20170213709
Publication date
Jul 27, 2017
Applied Materials, Inc.
Banqiu WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR IMPROVING CD MICRO-LOADING IN PHOTOMASK PLASMA ETCHING
Publication number
20160329210
Publication date
Nov 10, 2016
Applied Materials, Inc.
Zhigang MAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR IMPROVING CD MICRO-LOADING IN PHOTOMASK PLASMA ETCHING
Publication number
20140273490
Publication date
Sep 18, 2014
Applied Materials, Inc.
Zhigang MAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR IN-SITU CHAMBER DRY CLEAN IN PHOTOMASK PLASMA ETCHING P...
Publication number
20130048606
Publication date
Feb 28, 2013
Zhigang Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR IN-SITU CHAMBER DRY CLEAN DURING PHOTOMAS...
Publication number
20090325387
Publication date
Dec 31, 2009
APPLIED MATERIALS, INC.
Xiaoyi Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFTING PHOTOMASK AND A METHOD OF FABRICATING THEREOF
Publication number
20080070130
Publication date
Mar 20, 2008
SCOTT ALAN ANDERSON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for plasma etching a chromium layer suitable for photomask f...
Publication number
20060166107
Publication date
Jul 27, 2006
APPLIED MATERIALS, INC.
Xiaoyi Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of etching metal layers
Publication number
20040242005
Publication date
Dec 2, 2004
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of fabricating a magneto-resistive random access memory (MRA...
Publication number
20040209476
Publication date
Oct 21, 2004
APPLIED MATERIALS, INC.
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of etching magnetic and ferroelectric materials using a puls...
Publication number
20040173570
Publication date
Sep 9, 2004
APPLIED MATERIALS, INC.
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for removing conductive residue
Publication number
20040137749
Publication date
Jul 15, 2004
APPLIED MATERIALS, INC.
Chentsau Ying
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching a magnetic material
Publication number
20040129361
Publication date
Jul 8, 2004
APPLIED MATERIALS, INC.
Xiaoyi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for removing residue from a magneto-resistive random access...
Publication number
20040043620
Publication date
Mar 4, 2004
APPLIED MATERIALS, INC.
Chentsau Ying
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of patterning a layer of magnetic material
Publication number
20040043526
Publication date
Mar 4, 2004
APPLIED MATERIALS, INC.
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for removal of residue from a magneto-resistive random acces...
Publication number
20040029393
Publication date
Feb 12, 2004
APPLIED MATERIALS, INC.
Chentsau Ying
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of etching magnetic materials
Publication number
20040026369
Publication date
Feb 12, 2004
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for removal of metallic residue after plasma etching of a me...
Publication number
20030219912
Publication date
Nov 27, 2003
Xiaoyi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching a magnetic material
Publication number
20030219984
Publication date
Nov 27, 2003
Chentsau Ying
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Etching methods for a magnetic memory cell stack
Publication number
20030170985
Publication date
Sep 11, 2003
APPLIED MATERIALS, INC.
Jeng H. Hwang
B82 - NANO-TECHNOLOGY
Information
Patent Application
Plasma heating of a substrate with subsequent high temperature etching
Publication number
20020139774
Publication date
Oct 3, 2002
APPLIED MATERIALS, INC.
Jeng H. Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of plasma heating and etching a substrate
Publication number
20020117471
Publication date
Aug 29, 2002
Jeng H. Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...