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last 30 patents
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Patent Application
WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM
Publication number
20240420916
Publication date
Dec 19, 2024
ASML NETHERLANDS B.V.
Xiaoyu JI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF
Publication number
20240021404
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AN APPARATUS USING ENHANCED DEFLECTORS TO MANIPULATE CHARGED PARTIC...
Publication number
20230178328
Publication date
Jun 8, 2023
ASML NETHERLANDS B.V.
Yongxin WANG
H01 - BASIC ELECTRIC ELEMENTS