Xiaoyuan Hu

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Varying optical coefficients to generate spectra for polishing control
- Patent number 8,942,842
- Issue date Jan 27, 2015
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Building a library of spectra for optical monitoring
- Patent number 8,892,568
- Issue date Nov 18, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Tracking spectrum features in two dimensions for endpoint detection
- Patent number 8,814,631
- Issue date Aug 26, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
GENERATING MODEL BASED SPECTRA LIBRARY FOR POLISHING
- Publication number 20120278028
- Publication date Nov 1, 2012
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
VARYING OPTICAL COEFFICIENTS TO GENERATE SPECTRA FOR POLISHING CONTROL
- Publication number 20120276815
- Publication date Nov 1, 2012
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
BUILDING A LIBRARY OF SPECTRA FOR OPTICAL MONITORING
- Publication number 20120096006
- Publication date Apr 19, 2012
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
TECHNIQUES FOR MATCHING MEASURED SPECTRA TO REFERENCE SPECTRA FOR I...
- Publication number 20120034845
- Publication date Feb 9, 2012
- Xiaoyuan Hu
- B24 - GRINDING POLISHING
Information Patent Application
Tracking Spectrum Features In Two Dimensions For Endpoint Detection
- Publication number 20120021672
- Publication date Jan 26, 2012
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
ENDPOINT CONTROL DURING CHEMICAL MECHANICAL POLISHING BY DETECTING...
- Publication number 20120003759
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- Xiaoyuan Hu
- B24 - GRINDING POLISHING
Information Patent Application
TUNING OF POLISHING PROCESS IN MULTI-CARRIER HEAD PER PLATEN POLISH...
- Publication number 20110300776
- Publication date Dec 8, 2011
- Applied Materials, Inc.
- David H. Mai
- B24 - GRINDING POLISHING

Xiaoyuan Hu

Person

Patents Grantslast 30 patents

Varying optical coefficients to generate spectra for polishing control

Building a library of spectra for optical monitoring

Tracking spectrum features in two dimensions for endpoint detection

Patents Applicationslast 30 patents

GENERATING MODEL BASED SPECTRA LIBRARY FOR POLISHING

VARYING OPTICAL COEFFICIENTS TO GENERATE SPECTRA FOR POLISHING CONTROL

BUILDING A LIBRARY OF SPECTRA FOR OPTICAL MONITORING

TECHNIQUES FOR MATCHING MEASURED SPECTRA TO REFERENCE SPECTRA FOR I...

Tracking Spectrum Features In Two Dimensions For Endpoint Detection

ENDPOINT CONTROL DURING CHEMICAL MECHANICAL POLISHING BY DETECTING...

TUNING OF POLISHING PROCESS IN MULTI-CARRIER HEAD PER PLATEN POLISH...