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Xieqing Zhu
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London, GB
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Patents Grants
last 30 patents
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Patent Grant
Electron beam lithography apparatus focused through spherical aberr...
Patent number
6,620,565
Issue date
Sep 16, 2003
Agere Systems, INC
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron beam lithography focusing through spherical aberration int...
Patent number
6,440,620
Issue date
Aug 27, 2002
Agere Systems, INC
Victor Katsap
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam imaging apparatus
Patent number
6,420,714
Issue date
Jul 16, 2002
Agere Systems Guardian Corp.
Victor Katsap
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Electron beam lithography
Publication number
20030022077
Publication date
Jan 30, 2003
Victor Katsap
B82 - NANO-TECHNOLOGY