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Ximeng Guan
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Fremont, CA, US
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last 30 patents
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Patent Grant
Metal fill optimization for self-aligned double patterning
Patent number
10,381,338
Issue date
Aug 13, 2019
International Business Machines Corporation
Albert M. Chu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Metal fill optimization for self-aligned double patterning
Patent number
9,735,029
Issue date
Aug 15, 2017
International Business Machines Corporation
Albert M. Chu
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
METAL FILL OPTIMIZATION FOR SELF-ALIGNED DOUBLE PATTERNING
Publication number
20180082854
Publication date
Mar 22, 2018
International Business Machines Corporation
Albert M. Chu
G06 - COMPUTING CALCULATING COUNTING