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Patents Grants
last 30 patents
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Patent Grant
Substrate loss reduction for semiconductor devices
Patent number
12,148,706
Issue date
Nov 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conductive bond structure to increase membrane sensitivity in MEMS...
Patent number
12,139,399
Issue date
Nov 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
3D trench capacitor for integrated passive devices
Patent number
11,862,612
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrate rinse module in hybrid bonding platform
Patent number
11,854,795
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Patterning a transparent wafer to form an alignment mark in the tra...
Patent number
11,854,999
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
MEMS device and method for making the same
Patent number
11,851,318
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Chuan Teng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deposition system for high accuracy patterning
Patent number
11,818,944
Issue date
Nov 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ping-Yin Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for bond wave propagation control
Patent number
11,742,321
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Patterning a transparent wafer to form an alignment mark in the tra...
Patent number
11,721,637
Issue date
Aug 8, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate loss reduction for semiconductor devices
Patent number
11,652,058
Issue date
May 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Simultaneous bonding approach for high quality wafer stacking appli...
Patent number
11,621,186
Issue date
Apr 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low contamination chamber for surface activation
Patent number
11,508,562
Issue date
Nov 22, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Ping-Yin Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conductive bond structure to increase membrane sensitivity in MEMS...
Patent number
11,292,715
Issue date
Apr 5, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrate rinse module in hybrid bonding platform
Patent number
11,282,697
Issue date
Mar 22, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate loss reduction for semiconductor devices
Patent number
11,222,849
Issue date
Jan 11, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D trench capacitor for integrated passive devices
Patent number
11,211,362
Issue date
Dec 28, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Simultaneous bonding approach for high quality wafer stacking appli...
Patent number
11,094,575
Issue date
Aug 17, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for bond wave propagation control
Patent number
11,031,369
Issue date
Jun 8, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Approach for ultra thin-film transfer and handling
Patent number
10,962,878
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Ping-Yin Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrate rinse module in hybrid bonding platform
Patent number
10,665,449
Issue date
May 26, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Approach for ultra thin-film transfer and handling
Patent number
10,509,312
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Ping-Yin Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for bond wave propagation control
Patent number
10,497,667
Issue date
Dec 3, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of semiconductor wafer bonding and system thereof
Patent number
10,410,892
Issue date
Sep 10, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Kuan-Liang Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid bonding systems and methods for semiconductor wafers
Patent number
10,354,972
Issue date
Jul 16, 2019
Taiwan Semiconductor Manufacturing Company
Ping-Yin Liu
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Multiple metal layer semiconductor device and low temperature stack...
Patent number
10,283,448
Issue date
May 7, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Ping-Yin Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for a semiconductor structure
Patent number
10,160,638
Issue date
Dec 25, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Li-Cheng Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer bonding process and structure
Patent number
10,128,209
Issue date
Nov 13, 2018
Taiwan Semiconductor Manufacturing Company
Ping-Yin Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid bonding systems and methods for semiconductor wafers
Patent number
10,103,122
Issue date
Oct 16, 2018
Taiwan Semiconductor Manufacturing Company
Ping-Yin Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for wafer level bonding
Patent number
10,049,901
Issue date
Aug 14, 2018
Taiwan Semiconductor Manufacturing Company
Ping-Yin Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment systems and wafer bonding systems and methods
Patent number
10,037,968
Issue date
Jul 31, 2018
Taiwan Semiconductor Manufacturing Company
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PHOTONIC PACKAGE AND METHOD FOR FORMING THE SAME
Publication number
20240402441
Publication date
Dec 5, 2024
Taiwan Semiconductor Manufacturing company Ltd.
Kuo-Hao LEE
G02 - OPTICS
Information
Patent Application
SUBSTRATE LOSS REDUCTION FOR SEMICONDUCTOR DEVICES
Publication number
20240379570
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...
Publication number
20240367965
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATE RINSE MODULE IN HYBRID BONDING PLATFORM
Publication number
20240087879
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
3D TRENCH CAPACITOR FOR INTEGRATED PASSIVE DEVICES
Publication number
20240088103
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING
Publication number
20230371354
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ping-Yin Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LOSS REDUCTION FOR SEMICONDUCTOR DEVICES
Publication number
20230253334
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SIMULTANEOUS BONDING APPROACH FOR HIGH QUALITY WAFER STACKING APPLI...
Publication number
20230238268
Publication date
Jul 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING A TRANSPARENT WAFER TO FORM AN ALIGNMENT MARK IN THE TRA...
Publication number
20220375872
Publication date
Nov 24, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS DEVICE AND METHOD FOR MAKING THE SAME
Publication number
20220340407
Publication date
Oct 27, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Chuan TENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...
Publication number
20220219973
Publication date
Jul 14, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Integrate Rinse Module in Hybrid Bonding Platform
Publication number
20220216052
Publication date
Jul 7, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE LOSS REDUCTION FOR SEMICONDUCTOR DEVICES
Publication number
20220130765
Publication date
Apr 28, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D TRENCH CAPACITOR FOR INTEGRATED PASSIVE DEVICES
Publication number
20220115358
Publication date
Apr 14, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING A TRANSPARENT WAFER TO FORM AN ALIGNMENT MARK IN THE TRA...
Publication number
20210375780
Publication date
Dec 2, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SIMULTANEOUS BONDING APPROACH FOR HIGH QUALITY WAFER STACKING APPLI...
Publication number
20210335646
Publication date
Oct 28, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LOSS REDUCTION FOR SEMICONDUCTOR DEVICES
Publication number
20210335713
Publication date
Oct 28, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D TRENCH CAPACITOR FOR INTEGRATED PASSIVE DEVICES
Publication number
20210296283
Publication date
Sep 23, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR BOND WAVE PROPAGATION CONTROL
Publication number
20210272928
Publication date
Sep 2, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING
Publication number
20210273167
Publication date
Sep 2, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Ping-Yin Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...
Publication number
20200407220
Publication date
Dec 31, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SIMULTANEOUS BONDING APPROACH FOR HIGH QUALITY WAFER STACKING APPLI...
Publication number
20200381283
Publication date
Dec 3, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Xin-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOVEL APPROACH FOR ULTRA THIN-FILM TRANSFER AND HANDLING
Publication number
20200064730
Publication date
Feb 27, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Ping-Yin Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR BOND WAVE PROPAGATION CONTROL
Publication number
20200051950
Publication date
Feb 13, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Integrate Rinse Module in Hybrid Bonding Platform
Publication number
20200006052
Publication date
Jan 2, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
NOVEL APPROACH FOR ULTRA THIN-FILM TRANSFER AND HANDLING
Publication number
20190094682
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Ping-Yin Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR BOND WAVE PROPAGATION CONTROL
Publication number
20190096848
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Hybrid Bonding Systems and Methods for Semiconductor Wafers
Publication number
20190051628
Publication date
Feb 14, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Ping-Yin Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multiple Metal Layer Semiconductor Device and Low Temperature Stack...
Publication number
20180226337
Publication date
Aug 9, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Ping-Yin Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF SEMICONDUCTOR WAFER BONDING AND SYSTEM THEREOF
Publication number
20180144999
Publication date
May 24, 2018
Taiwan Semiconductor Manufacturing company Ltd.
KUAN-LIANG LU
H01 - BASIC ELECTRIC ELEMENTS