Xin Yin

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Madison, WI, US

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Patents Grantslast 30 patents

Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20220298632
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...