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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic method and lithographic apparatus
Patent number
11,493,851
Issue date
Nov 8, 2022
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Computational metrology
Patent number
11,347,150
Issue date
May 31, 2022
ASML Netherlands B.V.
Wim Tjibbo Tel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithographic method and lithographic apparatus
Patent number
11,156,923
Issue date
Oct 26, 2021
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Computational metrology
Patent number
10,990,018
Issue date
Apr 27, 2021
ASML Netherlands B.V.
Wim Tjibbo Tel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Determining an optimal operational parameter setting of a metrology...
Patent number
10,788,761
Issue date
Sep 29, 2020
ASML Netherlands B.V.
Leon Paul Van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and associated...
Patent number
10,545,410
Issue date
Jan 28, 2020
ASML Netherlands B.V.
Hakki Ergun Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,474,045
Issue date
Nov 12, 2019
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
COMPUTATIONAL METROLOGY
Publication number
20220260925
Publication date
Aug 18, 2022
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LITHOGRAPHIC METHOD AND LITHOGRAPHIC APPARATUS
Publication number
20220011681
Publication date
Jan 13, 2022
ASML NETHERLANDS B.V.
Hakki Ergün CEKLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPUTATIONAL METROLOGY
Publication number
20210191278
Publication date
Jun 24, 2021
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DETERMINING AN OPTIMAL OPERATIONAL PARAMETER SETTING OF A METROLOGY...
Publication number
20210018852
Publication date
Jan 21, 2021
ASML NETHERLANDS B.V.
Leon Paul VAN DIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPUTATIONAL METROLOGY
Publication number
20190361358
Publication date
Nov 28, 2019
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DETERMINING AN OPTIMAL OPERATIONAL PARAMETER SETTING OF A METROLOGY...
Publication number
20190250523
Publication date
Aug 15, 2019
ASML NETHERLANDS B.V.
Leon Paul VAN DIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
Publication number
20190079411
Publication date
Mar 14, 2019
ASML NETHERLANDS B.V.
Hakki Ergun CEKLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD AND LITHOGRAPHIC APPARATUS
Publication number
20180292761
Publication date
Oct 11, 2018
ASML NETHERLANDS B.V.
Hakki Ergün CEKLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY