Xingcai Su

Person

  • Fremont, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    UNIFORM ETCH SYSTEM

    • Publication number 20080210377
    • Publication date Sep 4, 2008
    • LAM RESEARCH CORPORATION
    • Dean J. Larson
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for selectively etching organosilicate glass with respect to...

    • Publication number 20040140289
    • Publication date Jul 22, 2004
    • Lam Research Corporation
    • Xingcai Su
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Uniform etch system

    • Publication number 20040112540
    • Publication date Jun 17, 2004
    • Lam Research Corporation
    • Dean J. Larson
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    Gas distribution system with tuning gas

    • Publication number 20040112538
    • Publication date Jun 17, 2004
    • Lam Research Corporation
    • Dean J. Larson
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Uniform etch system

    • Publication number 20040112539
    • Publication date Jun 17, 2004
    • Lam Research Corporation
    • Dean J. Larson
    • H01 - BASIC ELECTRIC ELEMENTS