Xingcun LI

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Patents Grantslast 30 patents

Information Patent Grant
Reaction chamber and semiconductor processing apparatus
- Patent number 11,715,632
- Issue date Aug 1, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xingcun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction chamber and plasma processing apparatus
- Patent number 10,854,482
- Issue date Dec 1, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xingcun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impedance matching system, impedance matching method, and semicondu...
- Patent number 10,699,881
- Issue date Jun 30, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jing Wei
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
IMPEDANCE MATCHING SYSTEM, IMPEDANCE MATCHING METHOD, AND SEMICONDU...
- Publication number 20190108977
- Publication date Apr 11, 2019
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jing WEI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
REACTION CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20190074164
- Publication date Mar 7, 2019
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xingcun LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER AND PLASMA PROCESSING APPARATUS
- Publication number 20170011938
- Publication date Jan 12, 2017
- Beijing NMC Co., Ltd.
- Xingcun LI
- H01 - BASIC ELECTRIC ELEMENTS