Xingjian CHEN

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming a plasma resistant coating, compon...
- Patent number 12,123,089
- Issue date Oct 22, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Jiao Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma process apparatus with low particle contamination and method...
- Patent number 11,371,141
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant structure for a gas delivery system in a plasma...
- Patent number 11,348,763
- Issue date May 31, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Zengdi Lian
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA TREATMENT APPARATUS, LOWER ELECTRODE ASSEMBLY AND FORMING ME...
- Publication number 20220351933
- Publication date Nov 3, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...
- Publication number 20210172049
- Publication date Jun 10, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Jiao DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT STRUCTURE FOR A GAS DELIVERY SYSTEM IN A PLASMA...
- Publication number 20200381213
- Publication date Dec 3, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Zengdi LIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS
- Publication number 20190338408
- Publication date Nov 7, 2019
- Advanced Micro-Fabrication Equipment Inc. China
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESS APPARATUS WITH LOW PARTICLE CONTAMINATION AND METHOD...
- Publication number 20190194802
- Publication date Jun 27, 2019
- Advanced Micro-Fabrication Equipment Inc, China
- Tuqiang NI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS
- Publication number 20140116338
- Publication date May 1, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Xingjian CHEN

Person

Patents Grantslast 30 patents

Method and apparatus for forming a plasma resistant coating, compon...

Plasma process apparatus with low particle contamination and method...

Corrosion-resistant structure for a gas delivery system in a plasma...

Patents Applicationslast 30 patents

PLASMA TREATMENT APPARATUS, LOWER ELECTRODE ASSEMBLY AND FORMING ME...

METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...

CORROSION-RESISTANT STRUCTURE FOR A GAS DELIVERY SYSTEM IN A PLASMA...

COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS

PLASMA PROCESS APPARATUS WITH LOW PARTICLE CONTAMINATION AND METHOD...

COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS