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Seongnam-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of manufacturing a semiconductor device
Patent number
10,529,618
Issue date
Jan 7, 2020
Samsung Electronics Co., Ltd.
Siqing Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method using plasma, and method of fabricating semiconducto...
Patent number
9,865,474
Issue date
Jan 9, 2018
Samsung Electronics Co., Ltd.
Gon-jun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer clamping apparatus
Patent number
9,768,051
Issue date
Sep 19, 2017
Samsung Electronics Co., Ltd.
Xinglong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method using plasma, and method of fabricating semiconducto...
Patent number
9,520,301
Issue date
Dec 13, 2016
Samsung Electronics Co., Ltd.
Go-jun Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20180358262
Publication date
Dec 13, 2018
Samsung Electronics Co., Ltd.
Siqing LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD USING PLASMA, AND METHOD OF FABRICATING SEMICONDUCTO...
Publication number
20170062235
Publication date
Mar 2, 2017
Samsung Electronics Co., Ltd.
Gon-Jun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLAMPING APPARATUS
Publication number
20170018451
Publication date
Jan 19, 2017
Samsung Electronics Co., Ltd.
Xinglong CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD USING PLASMA, AND METHOD OF FABRICATING SEMICONDUCTO...
Publication number
20160111298
Publication date
Apr 21, 2016
Go-jun Kim
H01 - BASIC ELECTRIC ELEMENTS