Xinhai HAN

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Analyzing in-plane distortion
- Patent number 11,948,846
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Hot showerhead
- Patent number 11,946,140
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate having a curved surface
- Patent number 11,851,759
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-temperature chamber and chamber component cleaning and mainten...
- Patent number 11,837,448
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Shuran Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply signal conditioning for an electrostatic chuck
- Patent number 11,776,835
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing in-plane distortion
- Patent number 11,637,043
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
3-D NAND control gate enhancement
- Patent number 11,622,489
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Thomas Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer stacks for 3D NAND extendability
- Patent number 11,569,257
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for depositing high density and high tensile st...
- Patent number 11,538,677
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Chuanxi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate having a curved surface
- Patent number 11,530,482
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3D NAND structures with decreased pitch
- Patent number 11,515,324
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Thomas Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate supports with improved high temperature chu...
- Patent number 11,501,993
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced chemical vapor deposition of films for improved ver...
- Patent number 11,365,476
- Issue date Jun 21, 2022
- Applied Materials, Inc.
- Praket P. Jha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stack overlay improvement
- Patent number 11,339,475
- Issue date May 24, 2022
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On stack overlay improvement for 3D NAND
- Patent number 11,276,569
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Yongjing Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3-D NAND control gate enhancement
- Patent number 11,164,882
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Thomas Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming film stacks with reduced defects
- Patent number 11,145,504
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Zhijun Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stack of multiple deposited semiconductor layers
- Patent number 11,056,406
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Liyan Miao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 10,793,954
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High deposition rate and high quality nitride
- Patent number 10,790,140
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-layer stacks for 3D NAND extendibility
- Patent number 10,700,087
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low dielectric constant oxide and low resistance OP stack for 3D NA...
- Patent number 10,553,427
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Xinhai Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a stack of multiple deposited semiconductor layers
- Patent number 10,490,467
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Liyan Miao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
VNAND tensile thick TEOS oxide
- Patent number 10,483,282
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric-metal stack for 3D flash memory application
- Patent number 10,475,644
- Issue date Nov 12, 2019
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-channel showerhead for formation of film stacks
- Patent number 10,276,353
- Issue date Apr 30, 2019
- Applied Materials, Inc.
- Kaushik Alayavalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor deposition of films for improved ver...
- Patent number 10,246,772
- Issue date Apr 2, 2019
- Applied Materials, Inc.
- Praket P. Jha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
VNAND tensile thick TEOS oxide
- Patent number 10,199,388
- Issue date Feb 5, 2019
- APPLIED MATEERIALS, INC.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FACEPLATE HAVING A CURVED SURFACE
- Publication number 20240044000
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Shailendra SRIVASTAVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANALYSIS OF MULTI-RUN CYCLIC PROCESSING PROCEDURES
- Publication number 20240045399
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Qinglin Chai
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DUR...
- Publication number 20230359179
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANALYZING IN-PLANE DISTORTION
- Publication number 20230238289
- Publication date Jul 27, 2023
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE HAVING A CURVED SURFACE
- Publication number 20230123089
- Publication date Apr 20, 2023
- APPLIED MATERIALS, INC.
- Shailendra SRIVASTAVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
3D NAND Structures with Decreased Pitch
- Publication number 20230093330
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Thomas Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-TEMPERATURE CHAMBER AND CHAMBER COMPONENT CLEANING AND MAINTEN...
- Publication number 20220344135
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Shuran SHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOT SHOWERHEAD
- Publication number 20220307131
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED SILICON NITRIDE FOR 3D NAND
- Publication number 20220216048
- Publication date Jul 7, 2022
- Applied Materials, Inc.
- Tianyang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYZING IN-PLANE DISTORTION
- Publication number 20220138396
- Publication date May 5, 2022
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK
- Publication number 20220102179
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING HIGH DENSITY AND HIGH TENSILE ST...
- Publication number 20220068630
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Chuanxi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
3-D NAND Control Gate Enhancement
- Publication number 20220005815
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Thomas Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER CONFIGURATIONS FOR CONTROLLED DEPOSITION
- Publication number 20210047730
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Sai Susmita Addepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODIFIED STACKS FOR 3D NAND
- Publication number 20210040607
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Xinhai Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORTS WITH IMPROVED HIGH TEMPERATURE CHU...
- Publication number 20210035843
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Jian Li
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PECVD PROCESS
- Publication number 20200399756
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE HAVING A CURVED SURFACE
- Publication number 20200385862
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Shailendra SRIVASTAVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER STACKS FOR 3D NAND EXTENDABILITY
- Publication number 20200295041
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Xinhai HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3-D NAND Control Gate Enhancement
- Publication number 20200266202
- Publication date Aug 20, 2020
- Applied Materials, Inc.
- Thomas Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING FILM STACKS WITH REDUCED DEFECTS
- Publication number 20200227258
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Zhijun JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D NAND STRUCTURES WITH DECREASED PITCH
- Publication number 20200203374
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Thomas Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING PHOSPHORUS-DOPED SILICON NITRIDE FILMS
- Publication number 20200190664
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Kesong HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STACK OVERLAY IMPROVEMENT FOR 3D NAND APPLICATION
- Publication number 20200173022
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Xinhai HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW DIELECTRIC CONSTANT OXIDE AND LOW RESISTANCE OP STACK FOR 3D NA...
- Publication number 20200126784
- Publication date Apr 23, 2020
- Applied Materials, Inc.
- Xinhai HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACK OF MULTIPLE DEPOSITED SEMICONDUCTOR LAYERS
- Publication number 20200091019
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Liyan Miao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ON STACK OVERLAY IMPROVEMENT FOR 3D NAND
- Publication number 20200043723
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Yongjing LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE TO ENABLE HIGH TEMPERATURE CLEAN FOR RAPID PROCESSING OF...
- Publication number 20190382889
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Venkata Sharat Chandra PARIMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VNAND TENSILE THICK TEOS OXIDE
- Publication number 20190229128
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Michael Wenyoung TSIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Analyzing in-plane distortion

Hot showerhead

PECVD process

Faceplate having a curved surface

High-temperature chamber and chamber component cleaning and mainten...

Power supply signal conditioning for an electrostatic chuck

Analyzing in-plane distortion

3-D NAND control gate enhancement

PECVD process

Multi-layer stacks for 3D NAND extendability

Systems and methods for depositing high density and high tensile st...

Faceplate having a curved surface

3D NAND structures with decreased pitch

Semiconductor substrate supports with improved high temperature chu...

Plasma enhanced chemical vapor deposition of films for improved ver...

Film stack overlay improvement

On stack overlay improvement for 3D NAND

3-D NAND control gate enhancement

Method of forming film stacks with reduced defects

Stack of multiple deposited semiconductor layers

PECVD process

High deposition rate and high quality nitride

Multi-layer stacks for 3D NAND extendibility

Low dielectric constant oxide and low resistance OP stack for 3D NA...

Methods of forming a stack of multiple deposited semiconductor layers

VNAND tensile thick TEOS oxide

Dielectric-metal stack for 3D flash memory application

Dual-channel showerhead for formation of film stacks

Plasma enhanced chemical vapor deposition of films for improved ver...

VNAND tensile thick TEOS oxide

Patents Applicationslast 30 patents

FACEPLATE HAVING A CURVED SURFACE

ANALYSIS OF MULTI-RUN CYCLIC PROCESSING PROCEDURES

METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DUR...

ANALYZING IN-PLANE DISTORTION

PECVD PROCESS

FACEPLATE HAVING A CURVED SURFACE

3D NAND Structures with Decreased Pitch

HIGH-TEMPERATURE CHAMBER AND CHAMBER COMPONENT CLEANING AND MAINTEN...

HOT SHOWERHEAD

DOPED SILICON NITRIDE FOR 3D NAND

ANALYZING IN-PLANE DISTORTION

POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK

SYSTEMS AND METHODS FOR DEPOSITING HIGH DENSITY AND HIGH TENSILE ST...

3-D NAND Control Gate Enhancement

CHAMBER CONFIGURATIONS FOR CONTROLLED DEPOSITION

MODIFIED STACKS FOR 3D NAND

SEMICONDUCTOR SUBSTRATE SUPPORTS WITH IMPROVED HIGH TEMPERATURE CHU...

PECVD PROCESS

FACEPLATE HAVING A CURVED SURFACE

MULTI-LAYER STACKS FOR 3D NAND EXTENDABILITY

3-D NAND Control Gate Enhancement

METHOD OF FORMING FILM STACKS WITH REDUCED DEFECTS

3D NAND STRUCTURES WITH DECREASED PITCH

METHODS FOR DEPOSITING PHOSPHORUS-DOPED SILICON NITRIDE FILMS

FILM STACK OVERLAY IMPROVEMENT FOR 3D NAND APPLICATION

LOW DIELECTRIC CONSTANT OXIDE AND LOW RESISTANCE OP STACK FOR 3D NA...

STACK OF MULTIPLE DEPOSITED SEMICONDUCTOR LAYERS

ON STACK OVERLAY IMPROVEMENT FOR 3D NAND

TECHNIQUE TO ENABLE HIGH TEMPERATURE CLEAN FOR RAPID PROCESSING OF...

VNAND TENSILE THICK TEOS OXIDE