Xinming Wang

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing unit
- Patent number 9,165,799
- Issue date Oct 20, 2015
- Ebara Corporation
- Xinming Wang
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning substrate
- Patent number 9,089,881
- Issue date Jul 28, 2015
- Ebara Corporation
- Xinming Wang
- B08 - CLEANING
Information Patent Grant
Method and apparatus for forming metal film
- Patent number 7,498,261
- Issue date Mar 3, 2009
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 7,407,821
- Issue date Aug 5, 2008
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interconnects forming method and interconnects forming apparatus
- Patent number 7,374,584
- Issue date May 20, 2008
- Ebara Corporation
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating solution, semiconductor device and method for manufacturing...
- Patent number 7,344,986
- Issue date Mar 18, 2008
- Ebara Corporation
- Hiroaki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus and plating method
- Patent number 7,332,198
- Issue date Feb 19, 2008
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus
- Patent number 7,297,210
- Issue date Nov 20, 2007
- Ebara Corporation
- Akihisa Hongo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing substrate
- Patent number 7,285,492
- Issue date Oct 23, 2007
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, method for manufacturing the same, and platin...
- Patent number 7,279,408
- Issue date Oct 9, 2007
- Ebara Corporation
- Hiroaki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interconnects forming method and interconnects forming apparatus
- Patent number 7,217,653
- Issue date May 15, 2007
- Ebara Corporation
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,172,979
- Issue date Feb 6, 2007
- Ebara Corporation
- Akihisa Hongo
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,141,274
- Issue date Nov 28, 2006
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, method for manufacturing the same, and platin...
- Patent number 7,060,618
- Issue date Jun 13, 2006
- Ebara Corporation
- Hiroaki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
- Publication number 20150287617
- Publication date Oct 8, 2015
- EBARA CORPORATION
- Xinming WANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20130098397
- Publication date Apr 25, 2013
- EBARA CORPORATION
- Xinming WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD
- Publication number 20130000671
- Publication date Jan 3, 2013
- Xinming WANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING UNIT
- Publication number 20120318304
- Publication date Dec 20, 2012
- Xinming WANG
- B08 - CLEANING
Information Patent Application
CLEANING METHOD AND CLEANING APPARATUS
- Publication number 20120160267
- Publication date Jun 28, 2012
- Masako KODERA
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
- Publication number 20110209727
- Publication date Sep 1, 2011
- Xinming WANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20100325913
- Publication date Dec 30, 2010
- Xinming WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20100105154
- Publication date Apr 29, 2010
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...
- Publication number 20100075498
- Publication date Mar 25, 2010
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrolytic polishing method of substrate
- Publication number 20090107851
- Publication date Apr 30, 2009
- Akira Kodera
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing method and apparatus
- Publication number 20090000549
- Publication date Jan 1, 2009
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for forming magnetic film
- Publication number 20080176008
- Publication date Jul 24, 2008
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20080138508
- Publication date Jun 12, 2008
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same, and Pro...
- Publication number 20080067679
- Publication date Mar 20, 2008
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Apparatus
- Publication number 20080047583
- Publication date Feb 28, 2008
- Akira Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device, method for manufacturing the same, and platin...
- Publication number 20080011228
- Publication date Jan 17, 2008
- Hiroaki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing substrate
- Publication number 20080000776
- Publication date Jan 3, 2008
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Interconnects forming method and interconnects forming apparatus
- Publication number 20070228569
- Publication date Oct 4, 2007
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20070224811
- Publication date Sep 27, 2007
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming metal film
- Publication number 20060057839
- Publication date Mar 16, 2006
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device, method for manufacturing the same, and platin...
- Publication number 20060040487
- Publication date Feb 23, 2006
- Hiroaki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing substrate
- Publication number 20050245080
- Publication date Nov 3, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wet processing method and processing apparatus of substrate
- Publication number 20050208774
- Publication date Sep 22, 2005
- Akira Fukunaga
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Interconnects forming method and interconnects forming apparatus
- Publication number 20050064702
- Publication date Mar 24, 2005
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20050022909
- Publication date Feb 3, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and apparatus
- Publication number 20050009213
- Publication date Jan 13, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming capping film
- Publication number 20050009340
- Publication date Jan 13, 2005
- Yasuhiko Saijo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating apparatus and post-electroless plating cleaning...
- Publication number 20040245214
- Publication date Dec 9, 2004
- Ichiro Katakabe
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus and method
- Publication number 20040231794
- Publication date Nov 25, 2004
- Akihisa Hongo
- B08 - CLEANING
Information Patent Application
Plating solution, semiconductor device and method for manufacturing...
- Publication number 20040235298
- Publication date Nov 25, 2004
- Hiroaki Inoue
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Xinming Wang

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing unit

Method and apparatus for cleaning substrate

Method and apparatus for forming metal film

Substrate processing method

Interconnects forming method and interconnects forming apparatus

Plating solution, semiconductor device and method for manufacturing...

Plating apparatus and plating method

Plating apparatus

Method for processing substrate

Semiconductor device, method for manufacturing the same, and platin...

Interconnects forming method and interconnects forming apparatus

Substrate processing apparatus and method

Substrate processing apparatus and method

Semiconductor device, method for manufacturing the same, and platin...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CLEANING SUBSTRATE

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING UNIT

CLEANING METHOD AND CLEANING APPARATUS

METHOD AND APPARATUS FOR CLEANING SUBSTRATE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...

Electrolytic polishing method of substrate

Substrate processing method and apparatus

Apparatus and method for forming magnetic film

Substrate Processing Method and Substrate Processing Apparatus

Semiconductor Device and Method for Manufacturing the Same, and Pro...

Substrate Processing Method and Apparatus

Semiconductor device, method for manufacturing the same, and platin...

Method and apparatus for processing substrate

Interconnects forming method and interconnects forming apparatus

Substrate processing method and substrate processing apparatus

Method and apparatus for forming metal film

Semiconductor device, method for manufacturing the same, and platin...

Method and apparatus for processing substrate

Wet processing method and processing apparatus of substrate

Interconnects forming method and interconnects forming apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and apparatus

Method and apparatus for forming capping film

Electroless plating apparatus and post-electroless plating cleaning...

Substrate processing apparatus and method

Plating solution, semiconductor device and method for manufacturing...