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Palo Alto, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system of image-forming multi-electron beams
Patent number
12,165,831
Issue date
Dec 10, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Joint electron-optical columns for flood-charging and image-forming...
Patent number
12,165,838
Issue date
Dec 10, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tilt-column multi-beam electron microscopy system and method
Patent number
12,068,129
Issue date
Aug 20, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput multi-electron beam system
Patent number
11,869,743
Issue date
Jan 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods of creating multiple electron beams
Patent number
11,651,934
Issue date
May 16, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High resolution electron beam apparatus with dual-aperture schemes
Patent number
11,508,591
Issue date
Nov 22, 2022
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam system for inspection and review of 3D devices
Patent number
11,335,608
Issue date
May 17, 2022
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro stigmator array for multi electron beam system
Patent number
11,056,312
Issue date
Jul 6, 2021
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High resolution electron energy analyzer
Patent number
10,964,522
Issue date
Mar 30, 2021
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for edge-of-wafer inspection and review
Patent number
10,770,258
Issue date
Sep 8, 2020
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deflection array apparatus for multi-electron beam system
Patent number
10,748,739
Issue date
Aug 18, 2020
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for aberration correction in an electron beam system
Patent number
10,224,177
Issue date
Mar 5, 2019
KLA-Tencor Corporation
Christopher Sears
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus with high resolutions
Patent number
10,096,447
Issue date
Oct 9, 2018
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for aberration correction in an electron beam system
Patent number
10,090,131
Issue date
Oct 2, 2018
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for edge-of-wafer inspection and review
Patent number
10,056,224
Issue date
Aug 21, 2018
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extractor electrode for electron source
Patent number
9,934,933
Issue date
Apr 3, 2018
KLA-Tencor Corporation
Laurence S. Hordon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for imaging a sample with an electron beam with a...
Patent number
9,905,391
Issue date
Feb 27, 2018
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat-spreading blanking system for high throughput electron beam ap...
Patent number
9,881,764
Issue date
Jan 30, 2018
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam imaging with dual Wien-filter monochromator
Patent number
9,443,696
Issue date
Sep 13, 2016
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for high-resolution electron beam imaging
Patent number
9,053,900
Issue date
Jun 9, 2015
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tilt-imaging scanning electron microscope
Patent number
8,921,782
Issue date
Dec 30, 2014
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual-lens-gun electron beam apparatus and methods for high-resoluti...
Patent number
8,859,982
Issue date
Oct 14, 2014
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron-optical system for high-speed and high-sensitivity inspect...
Patent number
8,664,594
Issue date
Mar 4, 2014
KLA-Tencor Corporation
Xinrong Jiang
G01 - MEASURING TESTING
Information
Patent Grant
Multiple-pole electrostatic deflector for improving throughput of f...
Patent number
8,536,538
Issue date
Sep 17, 2013
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam column and methods of using same
Patent number
8,461,526
Issue date
Jun 11, 2013
KLA-Tencor Corporation
Marian Mankos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple-beam system for high-speed electron-beam inspection
Patent number
8,362,425
Issue date
Jan 29, 2013
KLA-Tencor Corporation
Liqun Han
G01 - MEASURING TESTING
Information
Patent Grant
High-sensitivity and high-throughput electron beam inspection colum...
Patent number
8,294,125
Issue date
Oct 23, 2012
KLA-Tencor Corporation
Liqun Han
G01 - MEASURING TESTING
Information
Patent Grant
Immersion gun equipped electron beam column
Patent number
7,821,187
Issue date
Oct 26, 2010
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-function module for an electron beam column
Patent number
7,800,075
Issue date
Sep 21, 2010
Benyamin Buller
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam column for writing shaped electron beams
Patent number
7,427,765
Issue date
Sep 23, 2008
Jeol, Ltd.
Benyamin Buller
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR MULTI-BEAM ELECTRON MICROSCOPY USING A DETECT...
Publication number
20240194440
Publication date
Jun 13, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TILT-COLUMN MULTI-BEAM ELECTRON MICROSCOPY SYSTEM AND METHOD
Publication number
20240153737
Publication date
May 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
Publication number
20240096586
Publication date
Mar 21, 2024
KLA Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Creating Multiple Electron Beams with a Photocathode Film
Publication number
20230395349
Publication date
Dec 7, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods of Creating Multiple Electron Beams
Publication number
20230109032
Publication date
Apr 6, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH RESOLUTION, MULTI-ELECTRON BEAM APPARATUS
Publication number
20230066086
Publication date
Mar 2, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT MULTI-ELECTRON BEAM SYSTEM
Publication number
20220367140
Publication date
Nov 17, 2022
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH RESOLUTION ELECTRON BEAM APPARATUS WITH DUAL-APERTURE SCHEMES
Publication number
20220254667
Publication date
Aug 11, 2022
KLA Corporation
Xinrong Jiang
G01 - MEASURING TESTING
Information
Patent Application
ELECTRON SOURCE WITH MAGNETIC SUPPRESSOR ELECTRODE
Publication number
20220108862
Publication date
Apr 7, 2022
KLA Corporation
Nikolai Chubun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES
Publication number
20210327770
Publication date
Oct 21, 2021
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Joint Electron-Optical Columns for Flood-Charging and Image-Forming...
Publication number
20200194223
Publication date
Jun 18, 2020
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Deflection Array Apparatus for Multi-Electron Beam System
Publication number
20200118784
Publication date
Apr 16, 2020
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High Resolution Electron Energy Analyzer
Publication number
20190378705
Publication date
Dec 12, 2019
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Edge-of-Wafer Inspection and Review
Publication number
20190006143
Publication date
Jan 3, 2019
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Aberration Correction in an Electron Beam System
Publication number
20180158644
Publication date
Jun 7, 2018
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER OF PARTICULATE MATERIAL
Publication number
20180141126
Publication date
May 24, 2018
Velo3D, Inc.
Benyamin BULLER
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Application
HEAT-SPREADING BLANKING SYSTEM FOR HIGH THROUGHPUT ELECTRON BEAM AP...
Publication number
20170200581
Publication date
Jul 13, 2017
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Edge-of-Wafer Inspection and Review
Publication number
20170047193
Publication date
Feb 16, 2017
KLA-Tencor Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Aberration Correction in an Electron Beam System
Publication number
20160329189
Publication date
Nov 10, 2016
KLA-Tencor Corporation
Christopher Sears
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Imaging a Sample with an Electron Beam with a...
Publication number
20160322190
Publication date
Nov 3, 2016
KLA-Technology Drive
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM IMAGING WITH DUAL WIEN-FILTER MONOCHROMATOR
Publication number
20150340200
Publication date
Nov 26, 2015
KLA-Tencor Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TILT-IMAGING SCANNING ELECTRON MICROSCOPE
Publication number
20140151552
Publication date
Jun 5, 2014
KLA-Tencor Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL-LENS-GUN ELECTRON BEAM APPARATUS AND METHODS FOR HIGH-RESOLUTI...
Publication number
20140077077
Publication date
Mar 20, 2014
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR HIGH-RESOLUTION ELECTRON BEAM IMAGING
Publication number
20130256530
Publication date
Oct 3, 2013
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE-BEAM SYSTEM FOR HIGH-SPEED ELECTRON-BEAM INSPECTION
Publication number
20120241606
Publication date
Sep 27, 2012
Liqun Han
G01 - MEASURING TESTING
Information
Patent Application
MULTIPLE-POLE ELECTROSTATIC DEFLECTOR FOR IMPROVING THROUGHPUT OF F...
Publication number
20120205537
Publication date
Aug 16, 2012
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM COLUMN AND METHODS OF USING SAME
Publication number
20120138791
Publication date
Jun 7, 2012
Marian MANKOS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High-Sensitivity and High-Throughput Electron Beam Inspection Colum...
Publication number
20110114838
Publication date
May 19, 2011
Liqun HAN
G01 - MEASURING TESTING
Information
Patent Application
MULTI-FUNCTION MODULE FOR AN ELECTRON BEAM COLUMN
Publication number
20080308751
Publication date
Dec 18, 2008
JEOL, Inc.
Benyamin Buller
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam column for writing shaped electron beams
Publication number
20070085033
Publication date
Apr 19, 2007
APPLIED MATERIALS, INC.
Benyamin Buller
B82 - NANO-TECHNOLOGY