Xinye Liu

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Modulating etch selectivity and etch rate of silicon nitride thin f...
- Patent number 8,617,348
- Issue date Dec 31, 2013
- Novellus Systems, Inc.
- Xinye Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulating etch selectivity and etch rate of silicon nitride thin f...
- Patent number 8,187,486
- Issue date May 29, 2012
- Novellus Systems, Inc.
- Xinye Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adsorption based material removal process
- Patent number 8,043,972
- Issue date Oct 25, 2011
- Novellus Systems, Inc.
- Xinye Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for removing silicon nitride and other materials during fab...
- Patent number 7,977,249
- Issue date Jul 12, 2011
- Novellus Systems, Inc.
- Xinye Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adsorption based material removal process
- Patent number 7,416,989
- Issue date Aug 26, 2008
- Novellus Systems, Inc.
- Xinye Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Vaporizer for atomic layer deposition system
- Publication number 20070042119
- Publication date Feb 22, 2007
- Larry Matthysse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for cycle time improvements for atomic layer...
- Publication number 20050016956
- Publication date Jan 27, 2005
- Xinye Liu
- C30 - CRYSTAL GROWTH