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Xinyu Zhang
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Fremont, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for controlling darkspace gap in a chamber
Patent number
7,097,744
Issue date
Aug 29, 2006
Applied Materials, Inc.
Alan Barry Liu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and apparatus for controlling darkspace gap in a chamber
Publication number
20040251130
Publication date
Dec 16, 2004
APPLIED MATERIALS, INC.
Alan Barry Liu
H01 - BASIC ELECTRIC ELEMENTS