Xinyue Chen

Person

  • Sunnyvale, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CHAMBER PROCESSES FOR REDUCING BACKSIDE PARTICLES

    • Publication number 20220364227
    • Publication date Nov 17, 2022
    • Applied Materials, Inc.
    • Yi Zhou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...