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Xiong Yeu Chew
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Singapore, SG
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last 30 patents
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Patent Application
In-Situ Acoustic Monitoring of Chemical Mechanical Polishing
Publication number
20160013085
Publication date
Jan 14, 2016
Applied Materials, Inc.
Xiong Yeu Chew
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS AND METHODS FOR ACOUSTICAL MONITORING AND CONTROL OF THRO...
Publication number
20140329439
Publication date
Nov 6, 2014
Xiong Yeu Chew
B24 - GRINDING POLISHING