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Xu Cheng
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Munich, DE
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last 30 patents
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Patent Grant
Micromechanical sound transducer having a membrane support with tap...
Patent number
8,461,655
Issue date
Jun 11, 2013
Infineon Technologies AG
Wolfgang Klein
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Micromechanical Sound Transducer Having a Membrane Support with Tap...
Publication number
20120248554
Publication date
Oct 4, 2012
INFINEON TECHNOLOGIES AG
Wolfgang Klein
B81 - MICRO-STRUCTURAL TECHNOLOGY