Xu Zhu

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Pittsburgh, PA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-metal layer MEMS structure and process for making the same
- Patent number 7,202,101
- Issue date Apr 10, 2007
- Akustica, Inc.
- Kaigham J. Gabriel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for forming and acoustically connecting structures on a sub...
- Patent number 7,049,051
- Issue date May 23, 2006
- Akustica, Inc.
- Kaigham J. Gabriel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-metal layer MEMS structure and process for making the same
- Patent number 6,943,448
- Issue date Sep 13, 2005
- Akustica, Inc.
- Kaigham J. Gabriel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrathin form factor MEMS microphones and microspeakers
- Patent number 6,936,524
- Issue date Aug 30, 2005
- Akustica, Inc.
- Xu Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating micromachined structures and devices formed t...
- Patent number 6,458,615
- Issue date Oct 1, 2002
- Carnegie Mellon University
- Gary K. Fedder
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Ultrathin form factor MEMS microphones and microspeakers
- Publication number 20050095814
- Publication date May 5, 2005
- Xu Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ultrathin form factor MEMS microphones and microspeakers
- Publication number 20050095813
- Publication date May 5, 2005
- Xu Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multi-metal layer MEMS structure and process for making the same
- Publication number 20050000932
- Publication date Jan 6, 2005
- Kaigham J. Gabriel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multi-metal layer MEMS structure and process for making the same
- Publication number 20040145056
- Publication date Jul 29, 2004
- Kaigham J. Gabriel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process for forming and acoustically connecting structures on a sub...
- Publication number 20040146810
- Publication date Jul 29, 2004
- Kaigham J. Gabriel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multiple membrane structure and method of manufacture
- Publication number 20030210799
- Publication date Nov 13, 2003
- Kaigham J. Gabriel
- H04 - ELECTRIC COMMUNICATION TECHNIQUE