Xuechun Dai

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etch method for forming plasma etched silicon layer
- Patent number 6,790,374
- Issue date Sep 14, 2004
- Chartered Semiconductor Manufacturing Ltd.
- Kwok Keung Paul Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer in-situ dry clean and seasoning for plasma etching pro...
- Patent number 6,274,500
- Issue date Aug 14, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Dai Xuechun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trenchless buried contact process technology
- Patent number 5,888,887
- Issue date Mar 30, 1999
- Chartered Semiconductor Manufacturing, Ltd.
- Xudong Li
- H01 - BASIC ELECTRIC ELEMENTS