Xuedong LI

Follow

Person

Xuzhou, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Etching uniformity regulating device and method
- Patent number 12,027,345
- Issue date Jul 2, 2024
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Xiaobo Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma treatment system
- Patent number 11,837,439
- Issue date Dec 5, 2023
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Haiyang Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING SYSTEM WITH FARADAY SHIELDING DEVICE
- Publication number 20220319817
- Publication date Oct 6, 2022
- JIANGSU LEUVEN INSTRUMENTS CO., LTD
- Xuedong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA TREATMENT SYSTEM
- Publication number 20220254604
- Publication date Aug 11, 2022
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Haiyang LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC AIR INLET RADIO FREQUENCY CONNECTION TYPE CLEANING DEVICE
- Publication number 20220254605
- Publication date Aug 11, 2022
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Haiyang LIU
- B08 - CLEANING
Information Patent Application
ETCHING UNIFORMITY REGULATING DEVICE AND METHOD
- Publication number 20220013331
- Publication date Jan 13, 2022
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Xiaobo LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING DEVICE AND METHOD OF INDUCTIVELY COUPLED PLASMA
- Publication number 20210398774
- Publication date Dec 23, 2021
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Xiaobo LIU
- H01 - BASIC ELECTRIC ELEMENTS