Xuedong Liu

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 12,191,109
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 12,165,837
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus
- Patent number 12,142,453
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus with multiple detectors and methods...
- Patent number 12,142,455
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,087,541
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 12,080,515
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,033,830
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,961,697
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
- Patent number 11,948,772
- Issue date Apr 2, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,887,807
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Multiple charged-particle beam apparatus and methods
- Patent number 11,854,765
- Issue date Dec 26, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 11,804,356
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,721,521
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,705,304
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,688,580
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 11,676,792
- Issue date Jun 13, 2023
- ASML Netherlands, B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged particle beams
- Patent number 11,676,793
- Issue date Jun 13, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,670,477
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for aligning electron beams in multi-beam inspect...
- Patent number 11,614,416
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with single-beam mode
- Patent number 11,594,396
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,587,758
- Issue date Feb 21, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
- Patent number 11,569,060
- Issue date Jan 31, 2023
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus
- Patent number 11,538,655
- Issue date Dec 27, 2022
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 11,513,087
- Issue date Nov 29, 2022
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 11,469,076
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Massen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 11,469,074
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...
- Publication number 20250037967
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLEANING ELECTRON SOURCES IN CHARGED-PARTICL...
- Publication number 20240347313
- Publication date Oct 17, 2024
- ASML NETHERLANDS B.V.
- Zhidong DU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
- Publication number 20240145214
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240128044
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATION METHODS OF 2D PIXELATED DETECTOR FOR AN APPARATUS WITH PL...
- Publication number 20240079204
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20240071711
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF
- Publication number 20240021404
- Publication date Jan 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240014003
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
- Publication number 20230411110
- Publication date Dec 21, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-SCANNING OPERATION MODE OF SECONDARY-ELECTRON PROJECTION IMAGI...
- Publication number 20230377831
- Publication date Nov 23, 2023
- ASML NETHERLANDS B.V.
- Oleg KRUPIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...
- Publication number 20230360877
- Publication date Nov 9, 2023
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
- Publication number 20230280293
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20230282441
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20230274906
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN APPARATUS USING ENHANCED DEFLECTORS TO MANIPULATE CHARGED PARTIC...
- Publication number 20230178328
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUSES FOR ADJUSTING BEAM CONDITION OF CHARGED PAR...
- Publication number 20230170180
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20230107989
- Publication date Apr 6, 2023
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK
- Publication number 20230020194
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
- Publication number 20220375712
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20220319808
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...
- Publication number 20220262594
- Publication date Aug 18, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS
- Publication number 20220246395
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20220223366
- Publication date Jul 14, 2022
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS
- Publication number 20220216029
- Publication date Jul 7, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNMENT OF SECONDARY BEAMS IN MULTI-BEAM IN...
- Publication number 20220189726
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Qingpo XI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20220148851
- Publication date May 12, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE CHARGED PARTICLE BEAMS
- Publication number 20220005665
- Publication date Jan 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20210391139
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210391138
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210384008
- Publication date Dec 9, 2021
- ASML NETHERLANDS B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Xuedong Liu

Person

Patents Grantslast 30 patents

Multiple charged-particle beam apparatus with low crosstalk

Systems and methods for voltage contrast defect detection

Sample pre-charging methods and apparatuses for charged particle be...

System and method for scanning a sample using multi-beam inspection...

Multi-beam inspection apparatus

Charged particle beam apparatus with multiple detectors and methods...

Apparatus of plural charged-particle beams

Apparatus for multiple charged-particle beams

Multiple charged-particle beam apparatus with low crosstalk

Replaceable module for a charged particle apparatus

Apparatus using charged particle beams

Methods and apparatuses for adjusting beam condition of charged par...

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Multiple charged-particle beam apparatus and methods

Apparatus using multiple beams of charged particles

Multi-beam inspection apparatus with improved detection performance...

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Sample pre-charging methods and apparatuses for charged particle be...

Apparatus of plural charged particle beams

Apparatus using charged particle beams

System and method for aligning electron beams in multi-beam inspect...

Multi-beam inspection apparatus with single-beam mode

Apparatus of plural charged-particle beams

Methods and apparatuses for adjusting beam condition of charged par...

Multi-beam inspection apparatus

Systems and methods for voltage contrast defect detection

System and method for scanning a sample using multi-beam inspection...

Multiple charged-particle beam apparatus with low crosstalk

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...

SYSTEMS AND METHODS OF CLEANING ELECTRON SOURCES IN CHARGED-PARTICL...

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

OPERATION METHODS OF 2D PIXELATED DETECTOR FOR AN APPARATUS WITH PL...

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

APPARATUS USING CHARGED PARTICLE BEAMS

ANTI-SCANNING OPERATION MODE OF SECONDARY-ELECTRON PROJECTION IMAGI...

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...

AN APPARATUS USING ENHANCED DEFLECTORS TO MANIPULATE CHARGED PARTIC...

METHODS AND APPARATUSES FOR ADJUSTING BEAM CONDITION OF CHARGED PAR...

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...

APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

MULTI-BEAM INSPECTION APPARATUS

SYSTEM AND METHOD FOR ALIGNMENT OF SECONDARY BEAMS IN MULTI-BEAM IN...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

APPARATUS USING MULTIPLE CHARGED PARTICLE BEAMS

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS