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Xuefeng Hua
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Hyattsville, MD, US
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last 30 patents
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Patent Grant
Method and system for nanoscale plasma processing of objects
Patent number
7,470,329
Issue date
Dec 30, 2008
University of Maryland
Gottlieb S. Oehrlein
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and system for nanoscale plasma processing of objects
Publication number
20050051517
Publication date
Mar 10, 2005
Gottlieb S. Oehrlein
H01 - BASIC ELECTRIC ELEMENTS