Xuerang Hu

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus using multiple charged particle beams
- Patent number 12,243,709
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,237,143
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 12,237,144
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 12,191,109
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus
- Patent number 12,142,453
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 12,080,515
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,033,830
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,961,697
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,887,807
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus and methods
- Patent number 11,854,765
- Issue date Dec 26, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 11,804,356
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,721,521
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,705,304
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged particle beams
- Patent number 11,676,793
- Issue date Jun 13, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,670,477
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for aligning electron beams in multi-beam inspect...
- Patent number 11,614,416
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with single-beam mode
- Patent number 11,594,396
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,587,758
- Issue date Feb 21, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus
- Patent number 11,538,655
- Issue date Dec 27, 2022
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 11,469,074
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,398,368
- Issue date Jul 26, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for compensating dispersion of a beam separator...
- Patent number 11,328,894
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 11,302,514
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 11,289,304
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,282,675
- Issue date Mar 22, 2022
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-beam inspection apparatus
- Patent number 11,232,928
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-cell detector for charged particles
- Patent number 11,222,766
- Issue date Jan 11, 2022
- ASML Netherlands B.V.
- Joe Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,062,877
- Issue date Jul 13, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
- Publication number 20240145214
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240128044
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20240071711
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240014003
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
- Publication number 20230411110
- Publication date Dec 21, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...
- Publication number 20230360877
- Publication date Nov 9, 2023
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
- Publication number 20230280293
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20230282441
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20230107989
- Publication date Apr 6, 2023
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK
- Publication number 20230020194
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20220319808
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...
- Publication number 20220262594
- Publication date Aug 18, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS
- Publication number 20220246395
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20220223366
- Publication date Jul 14, 2022
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS
- Publication number 20220216029
- Publication date Jul 7, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE CHARGED PARTICLE BEAMS
- Publication number 20220005665
- Publication date Jan 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20210391139
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210384008
- Publication date Dec 9, 2021
- ASML NETHERLANDS B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210233736
- Publication date Jul 29, 2021
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210193433
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK
- Publication number 20210193437
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20210151291
- Publication date May 20, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS
- Publication number 20210151280
- Publication date May 20, 2021
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING T...
- Publication number 20200381212
- Publication date Dec 3, 2020
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK
- Publication number 20200381207
- Publication date Dec 3, 2020
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
- Publication number 20200381211
- Publication date Dec 3, 2020
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH SINGLE-BEAM MODE
- Publication number 20200321191
- Publication date Oct 8, 2020
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN APPARATUS USING CHARGED PARTICLE BEAMS
- Publication number 20200303155
- Publication date Sep 24, 2020
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CELL DETECTOR FOR CHARGED PARTICLES
- Publication number 20200286708
- Publication date Sep 10, 2020
- ASML NETHERLANDS B.V.
- Joe WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...
- Publication number 20200266023
- Publication date Aug 20, 2020
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Apparatus using multiple charged particle beams

Apparatus of plural charged-particle beams

Apparatus using multiple beams of charged particles

Multiple charged-particle beam apparatus with low crosstalk

Sample pre-charging methods and apparatuses for charged particle be...

Multi-beam inspection apparatus

Apparatus for multiple charged-particle beams

Multiple charged-particle beam apparatus with low crosstalk

Replaceable module for a charged particle apparatus

Apparatus using charged particle beams

Apparatus of plural charged-particle beams

Multiple charged-particle beam apparatus and methods

Apparatus using multiple beams of charged particles

Multi-beam inspection apparatus with improved detection performance...

Apparatus of plural charged-particle beams

Apparatus of plural charged particle beams

Apparatus using charged particle beams

System and method for aligning electron beams in multi-beam inspect...

Multi-beam inspection apparatus with single-beam mode

Apparatus of plural charged-particle beams

Multi-beam inspection apparatus

Multiple charged-particle beam apparatus with low crosstalk

Apparatus of plural charged-particle beams

Systems and methods for compensating dispersion of a beam separator...

Apparatus for multiple charged-particle beams

Apparatus using multiple beams of charged particles

Multi-beam inspection apparatus with improved detection performance...

Multi-beam inspection apparatus

Multi-cell detector for charged particles

Apparatus of plural charged-particle beams

Patents Applicationslast 30 patents

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

APPARATUS USING CHARGED PARTICLE BEAMS

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...

APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

MULTI-BEAM INSPECTION APPARATUS

APPARATUS USING MULTIPLE CHARGED PARTICLE BEAMS

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

MULTI-BEAM INSPECTION APPARATUS

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING T...

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS

MULTI-BEAM INSPECTION APPARATUS WITH SINGLE-BEAM MODE

AN APPARATUS USING CHARGED PARTICLE BEAMS

MULTI-CELL DETECTOR FOR CHARGED PARTICLES

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...