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Xuesong LU
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Advanced temperature monitoring system and methods for semiconducto...
Patent number
12,068,180
Issue date
Aug 20, 2024
Applied Materials, Inc.
Xuesong Lu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of cleaning a structure and method of depositing a capping l...
Patent number
11,830,725
Issue date
Nov 28, 2023
Applied Materials, Inc.
Naomi Yoshida
B08 - CLEANING
Information
Patent Grant
Chamber matching and calibration
Patent number
11,749,543
Issue date
Sep 5, 2023
Applied Materials, Inc.
Xuesong Lu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Directional selective junction clean with field polymer protections
Patent number
11,562,909
Issue date
Jan 24, 2023
Applied Materials, Inc.
Yu Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for controlling contact resistance in cobalt-...
Patent number
11,424,132
Issue date
Aug 23, 2022
Applied Materials, Inc.
Takashi Kuratomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced in-situ particle detection system for semiconductor substr...
Patent number
10,883,932
Issue date
Jan 5, 2021
Applied Materials, Inc.
Lin Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced coating method and materials to prevent HDP-CVD chamber ar...
Patent number
10,655,223
Issue date
May 19, 2020
Applied Materials, Inc.
Lin Zhang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced in-situ particle detection system for semiconductor substr...
Patent number
10,365,216
Issue date
Jul 30, 2019
Applied Materials, Inc.
Lin Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Advanced coating method and materials to prevent HDP-CVD chamber ar...
Patent number
10,208,380
Issue date
Feb 19, 2019
Applied Materials, Inc.
Lin Zhang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methodology for chamber performance matching for semiconductor equi...
Patent number
10,192,763
Issue date
Jan 29, 2019
Applied Materials, Inc.
Xuesong Lu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma treatment process for in-situ chamber cleaning efficiency en...
Patent number
10,002,745
Issue date
Jun 19, 2018
Applied Materials, Inc.
Lin Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition methods for uniform and conformal hybrid titanium oxide...
Patent number
9,881,787
Issue date
Jan 30, 2018
Applied Materials, Inc.
Chien-Teh Kao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DIRECTIONAL SELECTIVE JUNCTION CLEAN WITH FIELD POLYMER PROTECTIONS
Publication number
20220336223
Publication date
Oct 20, 2022
Applied Materials, Inc.
Yu Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-TITANIUM STRUC...
Publication number
20220336227
Publication date
Oct 20, 2022
Applied Materials, Inc.
TAKASHI KURATOMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHAMBER MATCHING AND CALIBRATION
Publication number
20220005713
Publication date
Jan 6, 2022
Applied Materials, Inc.
Xuesong Lu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DIRECTIONAL SELECTIVE JUNCTION CLEAN WITH FIELD POLYMER PROTECTIONS
Publication number
20210366722
Publication date
Nov 25, 2021
Applied Materials, Inc.
Yu Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING A STRUCTURE AND METHOD OF DEPOSITING A CAPPING L...
Publication number
20210233765
Publication date
Jul 29, 2021
Applied Materials, Inc.
Naomi YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-...
Publication number
20200144073
Publication date
May 7, 2020
Applied Materials, Inc.
TAKASHI KURATOMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADVANCED IN-SITU PARTICLE DETECTION SYSTEM FOR SEMICONDUCTOR SUBSTR...
Publication number
20190323960
Publication date
Oct 24, 2019
Applied Materials, Inc.
Lin ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED TEMPERATURE MONITORING SYSTEM AND METHODS FOR SEMICONDUCTO...
Publication number
20190221458
Publication date
Jul 18, 2019
Applied Materials, Inc.
Xuesong LU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...
Publication number
20190169743
Publication date
Jun 6, 2019
Applied Materials, Inc.
Lin ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADVANCED IN-SITU PARTICLE DETECTION SYSTEM FOR SEMICONDUCTOR SUBSTR...
Publication number
20180156727
Publication date
Jun 7, 2018
Applied Materials, Inc.
Lin ZHANG
G01 - MEASURING TESTING
Information
Patent Application
PLASMA TREATMENT PROCESS FOR IN-SITU CHAMBER CLEANING EFFICIENCY EN...
Publication number
20170323768
Publication date
Nov 9, 2017
Applied Materials, Inc.
Lin ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...
Publication number
20170159176
Publication date
Jun 8, 2017
Applied Materials, Inc.
Lin ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH PRODUCTIVITY PECVD TOOL FOR WAFER PROCESSING OF SEMICONDUCTOR...
Publication number
20170114462
Publication date
Apr 27, 2017
Applied Materials, Inc.
Lin ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODOLOGY FOR CHAMBER PERFORMANCE MATCHING FOR SEMICONDUCTOR EQUI...
Publication number
20170098565
Publication date
Apr 6, 2017
Applied Materials, Inc.
Xuesong LU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition Methods For Uniform And Conformal Hybrid Titanium Oxide...
Publication number
20160372324
Publication date
Dec 22, 2016
Applied Materials, Inc.
Chien-Teh Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING BACK SURFACE FIELD AND METALLIZED CONTACTS...
Publication number
20130199606
Publication date
Aug 8, 2013
Applied Materials, Inc.
Shuran Sheng
H01 - BASIC ELECTRIC ELEMENTS