Xuewei Wu

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Loading apparatus and physical vapor deposition apparatus
- Patent number 11,315,768
- Issue date Apr 26, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xuewei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and physical vapor deposition chamber
- Patent number 10,984,994
- Issue date Apr 20, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating device and heating chamber
- Patent number 10,937,672
- Issue date Mar 2, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber
- Patent number 10,297,477
- Issue date May 21, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xuewei Wu
- B08 - CLEANING
Information Patent Grant
Magnetron source, magnetron sputtering apparatus and magnetron sput...
- Patent number 9,399,817
- Issue date Jul 26, 2016
- Beijing NMC Co., Ltd.
- Yangchao Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LOADING APPARATUS AND PHYSICAL VAPOR DEPOSITION APPARATUS
- Publication number 20200144035
- Publication date May 7, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xuewei WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20180247799
- Publication date Aug 30, 2018
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jun ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE AND HEATING CHAMBER
- Publication number 20170365493
- Publication date Dec 21, 2017
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jun ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER
- Publication number 20160322243
- Publication date Nov 3, 2016
- Beijing NMC Co., Ltd.
- Xuewei WU
- B08 - CLEANING
Information Patent Application
MAGNETRON SOURCE, MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUT...
- Publication number 20130277205
- Publication date Oct 24, 2013
- Beijing NMC Co., Ltd.
- Yangchao Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...