Xueyu Qian

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-station decoupled reactive ion etch chamber
- Patent number 9,208,998
- Issue date Dec 8, 2015
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Gerald Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-station decoupled reactive ion etch chamber
- Patent number 8,366,829
- Issue date Feb 5, 2013
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Gerald Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple frequency plasma chamber, switchable RF system, and proces...
- Patent number 7,503,996
- Issue date Mar 17, 2009
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Jinyuan Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STATION DECOUPLED REACTIVE ION ETCH CHAMBER
- Publication number 20130008605
- Publication date Jan 10, 2013
- Gerald Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND BASE FOR PLASMA REACTOR HAVING IMPROVED WAF...
- Publication number 20100271745
- Publication date Oct 28, 2010
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Jinyuan CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE FREQUENCY PLASMA CHAMBER, SWITCHABLE RF SYSTEM, AND PROCES...
- Publication number 20080251207
- Publication date Oct 16, 2008
- ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA,
- Jinyuan Chen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MULTI-STATION DECOUPLED REACTIVE ION ETCH CHAMBER
- Publication number 20080011424
- Publication date Jan 17, 2008
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Gerald YIN
- H01 - BASIC ELECTRIC ELEMENTS