Xun Chen

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for lithography simulation
- Patent number 8,893,067
- Issue date Nov 18, 2014
- ASML Netherlands B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lithography simulation
- Patent number 8,516,405
- Issue date Aug 20, 2013
- ASML Netherlands B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process window signature patterns for lithography process control
- Patent number 8,318,391
- Issue date Nov 27, 2012
- ASML Netherlands B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for lithography simulation
- Patent number 8,209,640
- Issue date Jun 26, 2012
- ASML Netherlands B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process window signature patterns for lithography process control
- Patent number 8,057,967
- Issue date Nov 15, 2011
- ASML Netherlands B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for lithography simulation
- Patent number 7,873,937
- Issue date Jan 18, 2011
- ASML Netherlands B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for identifying and using process window signature patterns...
- Patent number 7,695,876
- Issue date Apr 13, 2010
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for monitoring integrated circuit fabrication
- Patent number 7,233,874
- Issue date Jun 19, 2007
- Brion Technologies, Inc.
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Grant
System and method for lithography simulation
- Patent number 7,120,895
- Issue date Oct 10, 2006
- Brion Technologies, Inc.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lithography simulation
- Patent number 7,117,478
- Issue date Oct 3, 2006
- Brion Technologies, Inc.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lithography simulation
- Patent number 7,117,477
- Issue date Oct 3, 2006
- Brion Tecnologies, Inc.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lithography simulation
- Patent number 7,114,145
- Issue date Sep 26, 2006
- Brion Technologies, Inc.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lithography simulation
- Patent number 7,111,277
- Issue date Sep 19, 2006
- Brion Technologies, Inc.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lithography process monitoring and control
- Patent number 7,053,355
- Issue date May 30, 2006
- Brion Technologies, Inc.
- Jun Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for lithography simulation
- Patent number 7,003,758
- Issue date Feb 21, 2006
- Brion Technologies, Inc.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lithography process monitoring and control
- Patent number 6,969,864
- Issue date Nov 29, 2005
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for lithography process monitoring and control
- Patent number 6,969,837
- Issue date Nov 29, 2005
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for monitoring integrated circuit fabrication
- Patent number 6,959,255
- Issue date Oct 25, 2005
- Brion Technologies, Inc.
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for monitoring integrated circuit fabrication
- Patent number 6,892,156
- Issue date May 10, 2005
- Brion Technologies, Inc.
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Grant
System and method for lithography process monitoring and control
- Patent number 6,884,984
- Issue date Apr 26, 2005
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for monitoring integrated circuit fabrication
- Patent number 6,879,924
- Issue date Apr 12, 2005
- Brion Technologies, Inc.
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Grant
System and method for lithography process monitoring and control
- Patent number 6,828,542
- Issue date Dec 7, 2004
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for monitoring integrated circuit fabrication
- Patent number 6,820,028
- Issue date Nov 16, 2004
- Brion Technologies, Inc.
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for monitoring integrated circuit fabrication
- Patent number 6,807,503
- Issue date Oct 19, 2004
- Brion Technologies, Inc.
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Grant
System and method for lithography process monitoring and control
- Patent number 6,806,456
- Issue date Oct 19, 2004
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for lithography process monitoring and control
- Patent number 6,803,554
- Issue date Oct 12, 2004
- Brion Technologies, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems, methods and computer program products for detecting the po...
- Patent number 6,064,486
- Issue date May 16, 2000
- Leland Stanford Junior University
- Xun Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
System and Method for Lithography Simulation
- Publication number 20120269421
- Publication date Oct 25, 2012
- ASML NETHERLANDS B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Process Window Signature Patterns for Lithography Process Control
- Publication number 20120021343
- Publication date Jan 26, 2012
- ASML NETHERLANDS B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and Method for Lithography Simulation
- Publication number 20110083113
- Publication date Apr 7, 2011
- ASML NETHERLANDS B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for identifying and using process window signature patterns...
- Publication number 20100151364
- Publication date Jun 17, 2010
- Brion Technology, Inc.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IDENTIFYING AND USING PROCESS WINDOW SIGNATURE PATTERNS...
- Publication number 20070050749
- Publication date Mar 1, 2007
- BRION TECHNOLOGIES, INC.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for lithography simulation
- Publication number 20070022402
- Publication date Jan 25, 2007
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for lithography process monitoring and control
- Publication number 20060000964
- Publication date Jan 5, 2006
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for lithography simulation
- Publication number 20050166174
- Publication date Jul 28, 2005
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for lithography simulation
- Publication number 20050122500
- Publication date Jun 9, 2005
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for monitoring integrated circuit fabrication
- Publication number 20050125184
- Publication date Jun 9, 2005
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Application
System and method for lithography simulation
- Publication number 20050120327
- Publication date Jun 2, 2005
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for lithography simulation
- Publication number 20050097500
- Publication date May 5, 2005
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for lithography simulation
- Publication number 20050091633
- Publication date Apr 28, 2005
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for lithography simulation
- Publication number 20050076322
- Publication date Apr 7, 2005
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for lithography process monitoring and control
- Publication number 20040232313
- Publication date Nov 25, 2004
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for monitoring integrated circuit fabrication
- Publication number 20040230396
- Publication date Nov 18, 2004
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Application
System and method for lithography process monitoring and control
- Publication number 20040222354
- Publication date Nov 11, 2004
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for monitoring integrated circuit fabrication
- Publication number 20040162692
- Publication date Aug 19, 2004
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for monitoring integrated circuit fabrication
- Publication number 20040153279
- Publication date Aug 5, 2004
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for monitoring integrated circuit fabrication
- Publication number 20040148120
- Publication date Jul 29, 2004
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Application
System and method for lithography process monitoring and control
- Publication number 20040140418
- Publication date Jul 22, 2004
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for lithography process monitoring and control
- Publication number 20040119036
- Publication date Jun 24, 2004
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for monitoring integrated circuit fabrication
- Publication number 20040098216
- Publication date May 20, 2004
- Jun Ye
- G01 - MEASURING TESTING
Information Patent Application
System and method for lithography process monitoring and control
- Publication number 20030226951
- Publication date Dec 11, 2003
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

System and method for lithography simulation

System and method for lithography simulation

Process window signature patterns for lithography process control

System and method for lithography simulation

Process window signature patterns for lithography process control

System and method for lithography simulation

Method for identifying and using process window signature patterns...

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography simulation

System and method for lithography simulation

System and method for lithography simulation

System and method for lithography simulation

System and method for lithography simulation

System and method for lithography process monitoring and control

System and method for lithography simulation

System and method for lithography process monitoring and control

System and method for lithography process monitoring and control

Method and apparatus for monitoring integrated circuit fabrication

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography process monitoring and control

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography process monitoring and control

Method and apparatus for monitoring integrated circuit fabrication

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography process monitoring and control

System and method for lithography process monitoring and control

Systems, methods and computer program products for detecting the po...

Patents Applicationslast 30 patents

System and Method for Lithography Simulation

Process Window Signature Patterns for Lithography Process Control

System and Method for Lithography Simulation

Method for identifying and using process window signature patterns...

METHOD FOR IDENTIFYING AND USING PROCESS WINDOW SIGNATURE PATTERNS...

System and method for lithography simulation

System and method for lithography process monitoring and control

System and method for lithography simulation

System and method for lithography simulation

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography simulation

System and method for lithography simulation

System and method for lithography simulation

System and method for lithography simulation

System and method for lithography process monitoring and control

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography process monitoring and control

Method and apparatus for monitoring integrated circuit fabrication

Method and apparatus for monitoring integrated circuit fabrication

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography process monitoring and control

System and method for lithography process monitoring and control

Method and apparatus for monitoring integrated circuit fabrication

System and method for lithography process monitoring and control